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Low Noise Thermal Hot Chuck System NEW

Product Name	Low Noise Thermal Chuck System
Available Upper Temperature Limits	Ambient up to 300℃
Available Low Temperature Limits	Room Temp. 25℃
Chuck Temperature Display Resolution	0.1℃
Temperature Accuracy	±0.1℃
제품특징	고온에서 노이즈 최소화
제품문의	제품 관련 상세 문의는 메일 또는 유선 연락 요망 utcmail@naver.com/Tel. 031-777-8222

<상세사항>

Low noise hot chuck system

The HC 3000 Thermal Chuck System has been specifically designed for with probing station and feature
- Super Low Noise performance
- Low Capacitance
- High Isolation Chuck
- Fast Cycling time
- Superior temperature uniformity
- Modular configuration

Configuration to Match Your Application
- Hot Temp only
- Hot and Cold Temp
- DC driven source(Low Noise)
- AC driven source(Economical)
- Coaxial Chucks(Normal Chuck)
- Triaxial Chuck(Low Noise)

Thermal hot chuck System-Unitek System (1).png

Hot chuck system Low noise hot chuck Hot chuck controller

Thermal Chuck specification

Temperature Range and Uniformity

- Total -50 deg to 399 deg

- Temp at -15 deg: +/- 2.5%

- Temp at 20 to 250 deg: +/- 1.5%

Offset+Leakage+Noise(Coaxial Chuck)

- <100 pico levels at 200 deg C

Electrical Isolation Ambient :

- Surface to ground : >100 Gohm(Coax), >5Tohm Tri

- Surface to guard : >5Tohm(Triax)

- Guide to ground : >5Tohm(Triax)

Electrical Isolation at max temp :

- Surface to ground : >10 Gohm(Coax), >1Tohm Tri

- Surface to guard : >5Tohm(Triax)

- Guide to ground : >5Tohm(Triax)

Chuck Capacitance :

- Surface to ground : Coax/Triax: <200pf - <500pf

- Surface to guard : Triax: <50pf - <500pf

Vertical expansion into probes <10 um(Ambient) < +/-12.5um throughout temp range

Probe Station High Power, hot chuck1.png

Probe Station with Hot Chuck

Heating Controller

Function	HS3000-DC	HS3200-AC
Control Method	PID, DC Power	PID, Zero Crossing, AC
Temperature Range	Ambient to 250℃ (Opt. max 399℃)	Ambient to 250 deg C(max 399℃)
Temperature Resolution	0.1 deg C	0.1 deg C
Temperature Stability	0.1 deg C	0.1 deg C
Over-tem. Protection	Max. +25 deg C	Max. 25 deg C
Status Indicators	Heat, Fault, PW	Heating
Noise & Leakage (Coaxial Chuck)	<10 Pico level to 100 ℃	<100 Pico level to 100 ℃
Interface(Option)	RS-232, RS-422	RS-232, RS-422

Cooling Controller(Option)

Function	Heat Exc.	C-2000-Zero	C-2000-Chiller
Control Method	ON/OFF	PN/OFF	PID Control
Temperature Range	Ambient to 250 ℃	0 deg C to 250 ℃	-50 deg C to 250 ℃
Temperature Resolution	+/- 0.1 deg C	+/- 0.1 deg C	+/- 0.1 deg C
Interface(Option)	RS-232, RS-422	RS-232, RS-422	RS-232, RS-422
Temperature Ramp	< 56 min Coaxial	<22 min Coaxial	<10 min Coaxial