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세부사항
오늘날 MEMS Market은 거대한 잠재력을 가진 시장으로 인정받고 있고,
이에 발맞춰 Micromanipulator사는 MEMS application에 맞는 Vacuum Probe Station을 개발했다.
이러한 MEMS Devices 들은 진공상태 또는 대기와 온도를 조절한 상태에서도 잘 작동 되도록 디자인
되고있다. 당사의 Vacuum Probe Station은 이러한 Dust free, moisture free, vacuum environmentspecial atmosphere & temperature와 같은 clean 상태를 충족시키기 위해서 특별히 고안된 Vacuum
Chamber 안에서 모든 Probing이 이루어지도록 만들어진 차세대 Vacuum Probe Station이다.
Vaccum Probe Station - VACP200& VACM200 Many MEMS are designed operate in a vacuum or in special environments with a controlled atmosphere and temperature.
Vacuum probe stations offer
Dust free Vacuum (pressure) environment Moisture free Special inert atmosphere requirementsBoth are based on the NANO-100TM Probe Station
| Large vacuum chamber for ease of use Low pressure or vacuum down to 1 x 10-6 Torr (1.3 x 10-6 millibar) Pump down is less than 5 minutes from initiation of the chamber closure to 1 x 10-6 Torr vacuum Special purge gases input controls (optional) Integrated vibration isolation system 4 access ports on chamber side One access port panel with 5 pass through connectors standard (chuck and 4 manipulators) |
VACP200 - Programmable Version
| Programmable version all pcProbe II functions + joystick control Computer control + joystick pcProbe II Features and Functions(pcNAV, pcVideo, pcWafer, pcInDie, etc.) Pattern recognition (optional) MicroTouch knobs (optional) Stage ± 3μm accuracy Manipulator(s) accuracy ± 1μm |
VACM200 - Motorized Version
| Motorized joystick control MicroTouch knobs (optional) Manipulator(s) X-Y-Z Stage X-Y, Platen Z Microscope X-Y |
Features Up to 8"(200mm) wafers, pieces, die or packaged parts A-zoom microscope to provide awide range of image options Feed through connections shown on side without the problem of changing microscope objectives of Vacuum Prober
VACP200 the image from the A-Zoom camera is displayed on the computer monitor screen and VACM200
the image is displayed on a color video monitor
Automated chamber open / close and evacuation for easy of use and operator safety
Programmable control (option)
Thermal Testing 가능
Multiple High Resolution Manipulators plus a Probe Card
High frequency/RF Testing
Low current Testing
Include laser cutter changing probe tips inside
Probe chamber is built in to an integrated active and passive vibration the vacuum chamber is easy isolation
VACP200 the image from the A-Zoom camera is displayed on the computer monitor screen and VACM200the image is displayed on a color video monitor
Automated chamber open / close and evacuation for easy of use and operator safety Programmable control (option) Thermal Testing 가능 Multiple High Resolution Manipulators plus a Probe Card High frequency/RF Testing Low current Testing Include laser cutter changing probe tips inside Probe chamber is built in to an integrated active and passive vibration the vacuum chamber is easy isolation Application RF MEMS (special atmosphere or vacuum) Optical switching micro-mirrors used in optical switching (dust free) Resonator elements including accelerometers and gyros (dust free) Microbolometers (uncooled thermal detector arrays) for IR imaging (vacuum) Pressure sensors (vacuum) Chemical sensors (controlled atmosphere and temperature) Any MEMS designed for aerospace applications (vacuum) SAMPLE IMAGES(MEMS + Standard Tests)
Available Options Chamber purge gas input controls and fittings MicroTouch knobs for control of programmable motorized station Additional manipulators for a total of 6 manipulators ordered at time of station order Additional probe holder and high isolation interface cables Probe card holder for 8"(200mm) probe cards Additional/custom vacuum feed through panels with up to 360 connections Active and Passive high frequency probes (special pass-through panel required) Touchdown sense module Thermal chuck systems: ambient, zero or -40°C to +150°C Special sample holders View port side panel mounted in feed through ports Second microscope for open chamber work Laser cutters from New Wave Additional standard light objectives for A-Zoom Eyepieces for A-Zoom microscope NAVCAM for A-Zoom microscope Light tight modifications Additional Training