Doublesided/Backside Probe Station HIT
| 특징 350PM |
- Wafer are mounted in an elevated wafer carrier assembly which mount on prober base frame
- Dual top side platens for backside probing
- Micomanipulator offers two solutions A conventional
- “Horizontal” system A unique (pat. pending) “Vertical”approach
- Two sets of platens for Doublesided capability
- 특수 제작된 Wafer Carrier는 안전하게 Wafer를 vacuum hold down 한다. |
| 특징 S6 & S8 |
- Emission Microscopy
- Opical Device Characterization
- Multi-layer failure analysis
- MEMS |
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