
12" Probe station
4가지 Fine Moving Stage
-Moving coaxial stage with rotation
-Manual Platen movement with fine control
-Aluminum platen with 4 point drive with fine control "Z"
-Fast lift via left lever positioned at the left side of probe station
최적의 Microscope 솔루션 제공
- Microscope travel range 1.0" with 1.0"
- Image Capture option for CCD Vision system
- Free-movement of scope-head for observation
충분한 공간의 Chuck size
- 8 inch Wafer capable
- Personal test benchtopsize
- Cross roller bearing way construction for 1.5㎛∼2.5㎛
기타 옵션 장착 가능
- Probe card holder
- 여러 종류의 Probe positioner, probe holder

Micro positioner
최적의 정밀도 마이크로포지셔
- X-Y-Z-Z' 축 +틸팅 5가지 Movement 제공
- 진공/마그넷 타입
- 최상의 정밀도 제공