| 2210 특징 |
- Large Area Substrate Prober(DUT,boards,Pcboards)
- 24"*24" X-Y microscope travel and 24"*24" manipulator platens with individual positioning controls
- Sample size up to 20"*20"
- Built on vibration isolation table for maximum stability |
| 2230 특징 |
- Electromigration Probe Station
- Two probe station in one system
- Single microscope servives both stages with 30"*13" X-Y travel
- Dual stages for 6 or 8" wafers, each independently driven in X&Y
- Dual platens with manipulators up to 22
- Built on vibration isolation table for stability |
| 2245 특징 |
- ATS Probe Station
- Specifically to accommodate delidded DUT probing access with Automatic Test Systems(ATS) - from several manufactures
- Operating at design speeds
- Provides vibration isolated probing access to the DUT because it is suspended above the tester |
| 2250 특징 |
- Large Area Display Prober
- Pull-Out 방식 for Load/unload
- Pull-Out 방식 for Load/unload
- Special manipulator "link arms" provide theta and planarity control of manipulator mounted "wedge" probe cards |
