| 특징 |
- 200 ~ 300 mm Wafer level technology
- Micro Touch knobs for Manual/Semi-auto control
- Keypad/Pendant 기본사양/별도 PC Software 없이 사용가능
- Low Current probing shield chamber
- Wafer loading-unloading tray 사용으로 Wafer 파손방지
- Glass scales, Encoder read head and Laser Calibration
- T-51 Aluminum ally Casting 사용으로 stability and vibration 최대화
- 진동 방지를 위한 vibration damping filler casting 사용 |
| 장점 |
- Manual/Motorized/programmable Station - MicroTouch
- 일체형 Shield Chamber for Low current probing
- Wafer Loading/Unloading Tray
- 2 Point Alignment & 10 - 99 memory locations
- Platen Up/Down 기능 Push Buttons
- 300mm Wafer Load/Unload 기능
- Jog & Index Push buttons & Program으로 간편사용
- Auto handler Compatible
- PC Align: Pattern Recognition and Auto Alignment Software
- PC Focus: Auto Focus Software
- PC Turret: Objective par-centering software |
| Application |
- Semiconductor memory devices
- MMIC devices
- LSI and Microwave devices
- RF and Microwave measurement
- Low current and low capacitance test
- Wafer level Reliability test |
| 옵션 |
- Backside Probing application
- Thermal Chuck system
- Full auto test 을 위한 Auto Wafer Handler Option
- Low Leakage Thermal Chuck/Light tight enclosure/Anti-vibration table
- Laser cutting option |
