특징 |
- Single point grounding for low current/low noise testing
- Stainless steel platen with 4-point support for lift
- Independent microscope lift/lock
- 6~8" Wafer level technology
- Platen Fine Lift: Sample stays in focus |
장점 |
- Manual/Motorized/Programmable microscope
- Programmable remote controlled manipulators
- Semi-auto wafer mapping and CAD
- ±1.5 micron stage accuracy and repeatability combined
- MicroTouch Control option |
Applications |
- Failure Analysis of production failures
- Wafer Level Reliability
- Microwave Measurement
- Lab/Analysis |
옵션 |
- Backside Probing application
- Thermal Chuck system
- Low Leakage Thermal Chuck/Light Tight
- Enclosure/Anti-vibration table
- Thermal chucks option
- Image & video systems
- 8800-ISE Light Tight Enclosure
- Laser cutting system |